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WAFER용 ROBOT

 

EFEM
EFEM

OFH-4102i
OFH-4102i

OFH-4000
OFH-4000

EG-303
EG-303

UTV-RS2600W
UTV-RS2600W

UTV-R2700H
UTV-R2700H

UTC-R800
UTC-R800

UTM-R3700F
UTM-R3700F

UTW-RSH5500
UTW-RSH5500

UTX/W-RD5700
UTX/W-RD5700

UTW/X-RD6700
UTW/X-RD6700