Wafer Transfer Robot (for Vacuum Environment)

UT-VSW3000NS 견적의뢰 UT-VSW3000NS UT-VSW3000NS Series 사양 ＊1 Mode UT-VSW3001NS UT-VSW3002NS Robot Type 5 axis SCARA Wafer Gripping Method Friction gripping method Operation Range（＊2） W2-axis（ Upper wrist axis） 20-340° W1-axis（ Lower wrist axis） 20-340° B-axis （Elbow axis） 20-340° A-axis （Shoulder axis） Endless Z-axis （Elevation axis） 50 mm 135 mm Max. Operation Speed W2-axis 150° /sec W1-axis 150° /sec B-axis Composite interpolation 950 mm/sec A-axis Z-axis 32 mm/sec Repeatability XYZ direction: P-P 0.05 mm each（＊3） Payload 1.0 kg（＊4） Cleanliness ISO Class 1 Mass Approx. 260 kg Approx. 285 kg Environment Temperature 5-40 ℃（ Robot body） / 5-80 ℃（Arm） Humidity 20-70 %, No condensation Pressure Atomospheric pressure ～ 10-6 Pa Controller CFD19A2 　 ＊1. Transfer perfomance differs from the standard when options are added. ＊2. Some arm positions are restrictive. ＊3. By in our evaluation condition. ＊4. Including Hand and Wafer. ×	UT-VDW3000HS 견적의뢰 UT-VDW3000HS UT-VDW3000HS series 사양 ＊1 Mode UT-VDW3000HS series Robot Type 4 axis Cylindrical Coordinate Wafer Gripping Method Friction gripping method Operation Range X2-axis 660 mm X1-axis 660 mm θ-axis 346° Z-axis 100 mm Max. Operation Speed X2-axis 380° /sec X1-axis 380° /sec θ-axis 300° /sec Z-axis 185 mm/sec Operating Time X2-axis 0.6 sec X1-axis 0.6 sec θ-axis 1.5 sec Z-axis 0.7 sec Repeatability XYZ direction: ±0.1 mm each （3σ）（＊2） Payload 2 kg （＊3） Cleanliness ISO Class 1 Mass 160 kg Environment Temperature 5-40 ℃/5-80 ℃ Humidity 20-70 %, No condensation Pressure Atomospheric pressure ～ 10-6 Pa 　 ＊1. Transfer perfomance differs from the standard when options are added.　 ＊2. By in our evaluation condition. ＊3. Including Hand-base, Hand and Wafer. ×	UT-VDX3000NS 견적의뢰 UT-VDX3000NS UT-VDX3000NS 사양 ＊1 Mode UT-VDX3000NS Category Standard Type Robot Type 2 axis Cylindrical Coordinate Operation Range X-axis 850 mm θ-axis Endless Z-axis － Cycle Time X-axis 2.0 sec / 850 mm θ-axis 2.5 sec / 180° Z-axis － Repeatability XY direction φ0.02 mm（3σ）（＊2） Ｚ direction － Payload 1.0 kg（＊3） Cleanliness ISO Class 1 Mass 29 kg Environment Temperature 5-40 ℃/5-80 ℃ Humidity 20-70 %, No condensation Pressure Atomospheric pressure ～ 10-7 Pa 　 ＊1. Transfer performance differs from the standard when options are added. ＊2. by in our evaluation condition. ＊3. including Hand-base, Hand and Wafer. ×	UT-VFX3000NM 견적의뢰 UT-VFX3000NM UT-VFX3000NM Series 사양 ＊1 Mode UT-VFX3000NM UT-VFX3010NM Robot Type 2（3） axis Cylindrical Coordinate Operation Range X-axis 510 mm 720 mm θ-axis 340° Z-axis （20 mm） Max. Operation Speed X-axis 250° /sec. θ-axis 220° /sec. Z-axis （121 mm/sec.） Cycle Time X-axis 1.4 sec. θ-axis 2.4 sec. Z-axis （0.6 sec.） Repeatability XYZ direction: ±0.1 mm each Payload 0.7 kg（Including Hand, Wafer） Cleanliness ISO Class 1（ISO-14644） Mass 29 kg（35 kg） Environment Temperature 10-40 ℃（Atmosphere side）/0-80 ℃（Vacuum Seal Unit） Humidity 20-70 ％, No condensation Pressure Atmospheric pressure-10-6 Pa Controller MFD19D4 　 ＊1. Transfer performance differs from the standard when options are added. ＊2. Numbers in parentheses are for Z axis mounting type. ×
UTVW-R2800H 견적의뢰 UTVW-R2800H UTVW-R2800H 사양 ＊1 Mode UTVW-R2800H Robot Type 4 axis Cylindrical Coordinate Operation Range X-axis 670 mm θ-axis 330° Z-axis 50 mm Max. Operation Speed X-axis 120° /sec. θ-axis 100° /sec. Z-axis 25 mm/sec. Cycle Time X-axis 1.5 sec / 680 mm θ-axis 2.4 sec / 180° Z-axis 1.6 sec / 50mm Repeatability XYZ direction: ±0.1 mm each Payload 2.0 kg（including Hand-Base, Hand, Wafer） Cleanliness ISO Class 3（ISO-14644） Mass 85 kg Environment Temperature 15-40 ℃（Atmosphere side）/15-80 ℃（Vacuum Seal Unit） Humidity 20-70 ％, No condensation Pressure Atmospheric pressure-10-6 Pa Controller SPC3000 Power Single phase 200-230±10 ％VAC, 50/60 Hz, 5 A External Dimensions W: 340 x D: 460 x H: 140 mm Interface LAN 1port for host Controller Parallel I/O for sensor input Safety Performance PLc（category 1） Environment Temperature 10-40 ℃ Humidity 30-80 ％, No condensation Teach Pendant External Dimensions W: 110 x D: 219 x H: 67 mm 　 ＊1.Transfer performance differs from the standard when options are added. ×

Wafer Transfer Robot (for Atmospheric Environment)

UT-AXW3000NS 견적의뢰 UT-AXW3000NS UT-AXW3000NS Series 사양 ＊1 Model UT-AXW3000NS UT-AXW3001NS Robot Type 6 axis Vertical Articulated Type Wafer Gripping Method Vacuum check／Edge clamp Operation Range（ ＊2） X-axis 550 mm Y-axis 2200 mm 2700 mm Z-axis 1186 mm 1436 mm Max. Operation Speed X-axis 1500 mm/sec Y-axis 1500 mm/sec Z-axis 1500 mm/sec Repeatability XYZ direction: ±0.05 mm each（ ＊3） Payload 1.0 kg（ ＊4） Cleanliness ISO Class 1 Mass Approx. 150 kg Approx. 155 kg Environment Temperature 5-40 ℃ Humidity 20-70 %, No condensation 　 ＊1. Transfer perfomance differs from the standard when options are added. ＊2. Some arm positions are restrictive. ＊3. By in our evaluation condition. ＊4. Including Hand-base, Hand and Wafer. ×	UTM-R3700F 견적의뢰 UTM-R3700F UTM-R3700F 사양 ＊1＊2 Mode UTM-R3700F Robot Type 6-axis articulated system Operation Range X1, X2-axis（Extension） 590 mm θ-axis（Rotation） 332° Z-axis（Elevation） 310-703.8 mm Y-axis（Slide） ±767.5 mm A-axis（Correction of Y-axis tilt） ±2° Max. Operation Speed X1, X2-axis 1600 mm/sec. θ-axis 540° /sec. Z-axis 1500 mm/sec. Y-axis 1500 mm/sec. Cycle Time X1, X2-axis 0.9 sec. / 590 mm θ-axis 1.0 sec. / 332° Z-axis 0.8 sec. / 703.8 mm Y-axis 1.4 sec. / 1535 mm Repeatability XθY directions（composite）: ±0.1 mm, Z direction: ±0.1 mm Payload 0.5 kg/arm（including Hand, Wafer） Cleanliness Edge Clamp E/E type ISO Class 3（ISO-14644） Vacuum E/E type ISO Class 1（ISO-14644） Facilities Edge Clamp E/E type Air 0.3-0.7 MpaG Vacuum E/E type Vacuum -80 kPaG or less, 10 NL/min. Vacuum（for purging) -80 kPaG or less, 40 NL/min total Environment Temperature 0-40 ℃ Humidity 20-70 %, No condensation Controller CFD19A2 　 ＊1. Transfer performance differs from the standard when options are added. ＊2. Wafer sensor and Mapping sensor are available. ×	SPR-AD008BTN/BWN 견적의뢰 SPR-AD008BTN/BWN SPR-AD008BTN/BWN 사양 Mode SPR-AD008BTN SPR-AD008BWN -120/035 -154/035 -120/070 -154/070 Robot Type 4 axis Cylindrical Coordinate 5 axis Cylindrical Coordinate Operation Range X1, X2-axis 1200 mm 1545 mm 1200 mm 1545 mm θ-axis 330° Z-axis 350 mm 700 mm Max. Operation Speed X1, X2-axis 1257 mm/sec 1618 mm/sec 1257 mm/sec 1618 mm/sec θ-axis 229° /sec Z-axis 286 mm/sec 572 mm/sec Cycle Time X1, X2-axis 2.2 sec / 1200 mm 2.2 sec / 1545 mm 2.2 sec / 1200 mm 2.2 sec / 1545 mm θ-axis 3.1 sec / 330° Z-axis 2.2 sec / 350 mm 2.2 sec / 700 mm Repeatability XYZ±0.2 mm each Payload 8 kg/arm（including E/E） Cleanliness ISO Class 4（ISO-14644） Mass 240 kg 260 kg Facilities Vacuum -80 kPa, 10 NL/min Environment Temperature 5-40 ℃ Humidity 20-70 %, No condensation 　 ×	UT-AFX/W4000NM 견적의뢰 UT-AFX/W4000NM UT-AFX/W4000NM Series 사양 ＊1 Mode UT-AFW4010NM UT-AFW4000NM Category Long Arm Type High Payload Type Robot Type 4axis Cylindrical Coordinate Operation Range Ｘ，Ａ-axis 770 mm 500 mm θ-axis 340° Z-axis 300 mm or 450 mm Ｒ-axis － （182°） Max. Operation Speed Ｘ，Ａ-axis 130° /sec θ-axis 200° /sec Z-axis 250 mm/sec Ｒ-axis － （180° /sec） Cycle Time Ｘ，Ａ-axis 1.4 sec / 770 mm 1.4 sec / 500 mm θ-axis 2.2sec/340° Z-axis 1.7 sec / 300 mm or 2.3 sec / 450 mm Ｒ-axis － （1.7 sec / 180°） Repeatability XYZ±0.1 mm XYZ±0.1 mm，R：±0.1° Payload 1 kg / 2 N·m（＊2） 4 kg / 8 N·m（＊2） Cleanliness Edge Clamp E/E type ISO Class 3（ISO-14644） Vacuum E/E type ISO Class 1（ISO-14644） Facilities Air － 0.4-0.7 MPa，200 L/min Vacuum -80 kPa，10 NL/min － Environment Temperature 5-40 ℃ Humidity 20-70 %, No condensation Controller MFD19D4 　 ＊1. Transfer performance differs from the standard when options are added. ＊2. Including Hand-Bace, Hand and Wafer. ×
UT-AFX/W3000NM 견적의뢰 UT-AFX/W3000NM UT-AFX/W3000NM Series 사양 ＊1 Mode UT-AFX3000NM UT-AFW3000NM Robot Type 3 axis Cylindrical Coordinate 4 axis Cylindrical Coordinate Operation Range X1, X2-axis 500 mm θ-axis 340° Z-axis 300 mm or 450 mm Max. Operation Speed X1, X2-axis 1000 mm/sec. θ-axis 200° /sec. Z-axis 250 mm/sec. Cycle Time X1, X2-axis 1.0 sec. / 500 mm θ-axis 2.2 sec. / 340° Z-axis 1.5 sec. / 300 mm, 2.1 sec. / 450 mm Repeatability XYZ direction: ±0.1 mm each Payload 1.0 kg/arm（including Hand-Base, Hand, Wafer） Cleanliness ISO Class 1（ISO-14644） Mass 30 kg 32 kg Facilities Vacuum -80 kPaG or less, 10 NL/min. Vacuum (for Purging) -80 kPaG or less, 10 NL/min. Environment Temperature 5-40 ℃ Humidity 20-70 %, No condensation Controller MFD19D4 　 ＊1. Transfer performance differs from the standard when options are added. ×	UTW-REH5500 견적의뢰 UTW-REH5500 UTW-REH5500 사양 ＊1＊2 Mode UTW-REH5500 Robot Type 4-axis Cylindrical Coordinate Operation Range X, A-axis 500 mm θ-axis 340° Z-axis 300 mm Max. Operation Speed X, A-axis 1800 mm/sec. θ-axis 360° /sec. Z-axis 500 mm/sec. Cycle Time X, A-axis 0.5 sec./ 500 mm θ-axis 1.2 sec./ 340° Z-axis 0.8 sec./ 300 mm Repeatability XYZ direction: ±0.1 mm each Payload 0.5 kg/arm（including Hand, Wafer） Cleanliness ISO Class 3（ISO-14644） Mass 32 kg Facilities Vacuum -80 kPaG or less, 10 NL/min. Environment Temperature 0-40 ℃ Humidity 20-70 %, No condensation Controller SFD19A2 　 ＊1. Transfer performance differs from the standard when options are added. ＊2. Wafer sensor and Mapping sensor are available. ×	UTX/W-RF5501RW 견적의뢰 UTX/W-RF5501RW UTX/W-RF5501RW 사양 ＊1 Mode UTX-RF5501RW UTW-RF5501RW Robot Type 3 axis Cylindrical Coordinate 4 axis Cylindrical Coordinate Operation Range X, A-axis 500 mm θ-axis 340° Z-axis 300 mm R-axis 180° Max. Operation Speed X, A-axis 800 mm/sec. θ-axis 130° /sec. Z-axis 200 mm/sec. R-axis 150° /sec. Cycle Time X, A-axis 1.6 sec. / 500 mm θ-axis 3.2 sec. / 340° Z-axis 2.5 sec. / 300 mm R-axis 2.0 sec. / 180° Repeatability XYZ direction: ±0.1 mm each R direction: ±0.5° Payload 1.5 kg/arm（including Hand-Base, Hand, Wafer） Cleanliness ISO Class 4（ISO-14644） Mass 32 kg 40 kg Facilities Air For wafer clamp： 0.25-0.3 MPaG For internal pressure application and condensation prevention： 0.05 MPaG Environment Temperature 0-40 ℃ Humidity 20-70 %, No condensation Controller CS-8100 Power 100-115±10 ％VAC, 50/60 Hz, 5 A External Dimensions W: 214 x D: 315 x H: 395 mm Interface RS-232C 1port for host Controller Parallel I / O by sequencer Safety Performance PLc（category 1） Environment Temperature 0-40 ℃ Humidity 20-70 ％, No condensation Teach Pendant External Dimensions W: 123 x D: 201 x H: 64 mm 　 ＊1. Transfer performance differs from the standard when options are added. ×

Wafer Aligner

OFH-4100 견적의뢰 OFH-4100 OFH-4100 Series 사양 Mode Applicable Wafer Size （＊1）（＊2） OFH-4100 200-300 mm OFH-4101 150-200 mm OFH-4102 100-200 mm OFH-4103 50-150 mm Repeatability XY direction: ±0.1 mm each θdirection: ±0.2° Alignment Time 1.8 sec.（ ＊3） Cleanliness ISO Class 3（ ISO-14644） Mass 8 kg Facilities Vacuum -80 kPaG or less, 10 NL/min. Power 24±10 %VDC, 3 A Environment Temperature 15-25 ℃ Humidity 20-60 %, No condensation 　 ＊1. There are OFH-4100Q series as quartz wafer compatible products. Please inquire details. ＊2. There are wafer edge inspection series with an option. Please inquire details. ＊3. For 50 mm wafers, the alignment time is 2.5 seconds. ×

EG-303 견적의뢰 EG-303 EG-303 Series 사양 Mode EG-303 Applicable Wafer Size 300 mm Wafer Holding Method Edge clamp Repeatability High Accuracy Mode XY: ±0.05 mm θ: ±0.075° Normal Mode XY: ±0.2 mm θ: ±0.1 Alignment Time High Accuracy Mode Average 7.5 sec. Normal Mode Average 3.5 sec. Cleanliness ISO Class 3（ISO-14644) Mass 7 kg Facilities Power 24±10 %VDC, 3A Environment Temperature 0-40 ℃ Humidity 20-70 %, No condensation 　 ＊1. We have a EG-303B with buffered specification and EG-303G with grip state detection sensor. ×